Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique Conference Paper

http://dx.doi.org/10.1109/apccas.2010.5775024

authors

Ahmad, Farooq
Dennis, John Ojur
Hamid, Nor Hisham bin
Md Khir, Mohd Haris Bin
Ahmed, Abdelaziz Yousif

publication date

2010

Digital Object Identifier (DOI)

https://doi.org/10.1109/apccas.2010.5775024