Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing Academic Article

http://dx.doi.org/10.1088/1742-6596/495/1/012045

authors

Hawari, Huzein Fahmi bin
Wahab, Y
Azmi, M T
Md Shakaff, A Y
Hashim, U
Johari, S

publication date

2014

published in

Journal of Physics: Conference Series Journal

Digital Object Identifier (DOI)

https://doi.org/10.1088/1742-6596/495/1/012045

start page

012045

volume

495