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High quality indium tin oxide (ITO) film growth by controlling pressure in RF magnetron sputtering
Conference Paper
http://dx.doi.org/10.1109/pvsc.2012.6317992
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authors
Aliyu, M. M.
Hossain, S.
Husna, J.
Dhar, N.
Huda, M. Q.
Sopian, Kamaruzzaman
Amin, N.
publication date
2012
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/pvsc.2012.6317992