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Theoretical analysis of resonant lateral electrostatic Comb drive actuator and sensor
Conference Paper
http://dx.doi.org/10.1109/natpc.2011.6136435
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authors
Ahmad, Farooq
Md Khir, Mohd Haris Bin
Hamid, Nor Hisham bin
Dennis, John Ojur
publication date
2011
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/natpc.2011.6136435
