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Modeling and simulation of polysilicon piezoresistors in a CMOS-MEMS resonator for mass detection
Conference Paper
http://dx.doi.org/10.1109/rsm.2015.7354957
Overview
Identity
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Overview
authors
Gafare, Mawahib
Md Khir, Mohd Haris Bin
Rabih, Almur
Ahmed, Abdelaziz
Dennis, J.O.
publication date
2015
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/rsm.2015.7354957
