Microelectronics Reliability Journal

publication venue for

Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator. 63:82-89. 2016
Temperature dependent Young's modulus and quality factor of CMOS-MEMS resonator: Modelling and experimental approach. 57:64-70. 2016

publisher

Elsevier BV Publisher

International Standard Serial Number (ISSN)

0026-2714