Simulation and modeling the effect of temperature on resonant frequency of a CMOS-MEMS resonator Conference Paper

http://dx.doi.org/10.1063/1.4757433

authors

publication date

2012

published in

INTERNATIONAL SYMPOSIUM ON GREEN AND SUSTAINABLE TECHNOLOGY (ISGST2019) Journal

Digital Object Identifier (DOI)

https://doi.org/10.1063/1.4757433