CMOS-MEMS resonator parametric variation analysis through equivalent circuit modeling Conference Paper

http://dx.doi.org/10.1109/icias.2016.7824056

authors

Mian, Muhammad Umer
Dennis, John Ojur
Md Khir, Mohd Haris Bin
Sutri, Nebyu Yonas
Ahmed, Abdelaziz Yousif
Tang, Tong Boon

publication date

2016

Digital Object Identifier (DOI)

https://doi.org/10.1109/icias.2016.7824056