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Design, Modeling and Simulation of MEMS Resonator for Humidity Sensor Application
Conference Paper
http://dx.doi.org/10.1109/sas48726.2020.9220082
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authors
Mutharpavalar, Ashaashvini
Ahmed, A. Y.
Mohd Nor, Nursyarizal
publication date
2020
Identity
Digital Object Identifier (DOI)
https://doi.org/10.1109/sas48726.2020.9220082
