Theoretical modeling and FEA simulation of a CMOS-MEMS resonator Conference Paper

http://dx.doi.org/10.1109/rsm.2017.8069110

authors

Ahmed, A. Y.
Rabih, Almur. A. S.
Md Khir, Mohd Haris Bin
Basuwaqi, A. M. A.
Dennis, J. O.

publication date

2017

Digital Object Identifier (DOI)

https://doi.org/10.1109/rsm.2017.8069110