Characterization of embedded microheater of a CMOS–MEMS gravimetric sensor device Academic Article uri icon

authors

  • Dennis, John Ojur
  • Rabih, Almur A.S.
  • Md Khir, Mohd Haris Bin
  • Ahmed, Abdelaziz Yousif
  • Ahmed, Mawahib Gafare
  • Mian, Muhammad Umer

publication date

  • 2016

number of pages

  • 9

start page

  • 179

end page

  • 188

volume

  • 55