Thermal Agglomeration of Ultrathin Silicon-on-Insulator Layers: Crystalline Orientation Dependence Academic Article

http://dx.doi.org/10.1143/jjap.47.1461

authors

Fan, Youjun
Nuryadi, Ratno
Burhanudin, Zainal Arif Bin
Tabe, Michiharu

publication date

2008

published in

Japanese Journal of Applied Physics Journal

Digital Object Identifier (DOI)

https://doi.org/10.1143/jjap.47.1461

start page

1461

volume

47

issue

3R